Robot

Atel has various Robots from a small one to a big one. To provide robot to using environment. Handling wafer is back side contactless to quality requirements. High spped handling

PR1199-300-00421
Link Type Single Arm Robot

PR1199-300-00421

Characteristic PR Robot improved the ratio of making to sheet metal body-work. High rigidity and stable high speed handling be achieved. Chuck with vacuum suction made in aluminum. Controller be suitable for slide axis(X axis).
Wafer holding methodvacuum suction
Controll method Simple operation through serial interface

PR2111-60-00393
Link Type Double Arm Robot

PR2111-60-00393

Characteristic PR Robot improved the ratio of making of sheet metal body-work. High rigidity and stable high speed handling be achieved.
Wafer holding methodvacuum suction
Control method Simple operation through serial interface

SYPR101-00493
6 inch Cassette Handling System

SYPR101-00493

Characteristic Cassette with full of sapphire wafer be able to equip. Compact body, compact space. Drive system Driving gripp axis and tilt axis with stepping motor
Wafer holding methodvacuum suction
Control method Simple operation through serial interface

FR1200-2440
Foup Handling Robot For Foup Stocker

SYPR101-00493

Characteristic徴 Specially designed for Foup handling 300mm wafer Foup Stocker Kinematic pin, fiber sensor and clamp mechanism to fix Foup installed in Foup loading stage. Slide mechanism shifted arm horizontally located. Function and performance handling Foup with stable high speed perfect.
Wafer holding methodvacuum suction
Control method Simple operation through serial interface

LR2000-650-S001
Linear Type Double Arm Robot

SYPR101-00493

Characteristic Compact body, long stroke Rigid arm mechanics gives high speed operation with superior precision Used many sheet metal body-work achieve to reduce the cost 2 phase stepping motor be equipped Optional mounting bracket for custom handing axis Slide axis is available to control servo motor incremental encoder specification 24 inch  1.1 thickness For FPD glass substrates
Wafer holdingvacuum suction
Contorl method Simple operation through serial interface