System

Automatic Micro Inspection System

Judge an alien substance, a wound, an irregularity automatically, a target shape in comparison with quality goods photographing the entire surface in the wafer.

product_AutomaticMicro

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Auto Macro

High speed operation giving a result photogrping the wafer by 4 times. It defects wafer crack automatically. Be able to defect crack and chipping of wafer edge.

product_AutomaticMacro

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Inspection System(Macro・Micro)

For taiko wafer, thin wafer, bir curve wafer Inspectionn System There is the example that updated the microscope which do not use in the latest inspection system.

product_inspSystem

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High Speed Counter

High-speed movement by photographing the wafer entire surface collectively, and making image processing. The ink scattering at the time of the marking is detectable.

product_HighSpeedCounter

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Sorter

For plural wafer size, plural casette auto-matically. Aligment function, wafer ID function.Able to build more than 3 ports.

product_SYAR100-00574

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Product

Robot

Atel has various Robots from a small thing to a big thing. To provide robot to using environment. Handling wafer is back side contactless to quality requirements. High spped handling

pr2111

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Electric XY Stage

Be realized low cost and high precision by software improvement. Able to operate according to a recipe automatically by combining it with Atel's software. All back side wafer vacuum suction, center vacuum suction.

XYStage

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Aligner

Be possible for vacuum suction whole backside, backside contactless, center, curve wafer for planarization.

pr2111

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Macro Inspection System

Front and back 360 degrees, continuous rotating, turning. Be available backside contactless, bir curve wafer.

Macro

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Microscope Remodel

Changed manual wafer to low price auto focus. As needed order made and automating image processing.

AF

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Waterproof Unit

We develop the correspondence product about the simple substance units such as Robot or Aligner.

wr2000-3

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Atel product catalogue pdf

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